| Myplas PECVD plasma enhanced CVD system |
|
| Plasma: | capacitive coupled plasma (CCP) |
| Plasma chamber: | 180 mm x 180 mm x 300 mm (W x H x D) |
| Plasma power: | 300W |
| Gas lines: | 3 (with MFC’s) |
| Plasma chamber: | 180 mm x 180 mm x 210 mm (W x H x D) |
| Unit dimensions: | 400 mm x 520 mm x 730 mm (W x H x D) |
| Unit weight: | approx. 80 kg (without pump) |
| Control system: | PLC control with PC user interface |
| Power connection: | 230V / 16A |
| Myplas ALD thermal ALD system |
|
| Substrate temperature: | ambient to 400°C |
| Precursor lines: | 2 (ambient to 200°C) |
| Gas lines: | 4 (3 with MFC’s, 1 pulse controlled) |
| Reaction chamber: | 102 mm x 10 mm x 110 mm (W x H x D) |
| Vacuum chamber: | 180 mm x 180 mm x 300 mm (W x H x D) |
| Unit dimensions: | 650 mm x 520 mm x 730 mm (W x H x D) |
| Unit weight: | approx. 100 kg (without pump) |
| Control system: | PLC control with PC user interface |
| Power connection: | 230V / 16A |
| Options: | additional gas and precursor lines |
| Myplas PEALD plasma enhanced and thermal ALD system |
|
| Plasma: | capacitive coupled plasma (remote mode) |
| Plasma power: | 300W |
| Substrate temperature: | ambient to 400°C |
| Precursor lines: | 2 (ambient to 200°C) |
| Gas lines: | 4 (3 with MFC’s, 1 pulse controlled) |
| Reaction chamber: | 102 mm x 10 mm x 110 mm (W x H x D) |
| Vacuum chamber: | 180 mm x 180 mm x 300 mm (W x H x D) |
| Unit dimensions: | 650 mm x 520 mm x 730 mm (W x H x D) |
| Unit weight: | approx. 120 kg (without pump) |
| Control system: | PLC control with PC user interface |
| Power connection: | 230V / 16A |
| Options: | additional gas and precursor lines |
| Myplas PEALD 3D plasma enhanced ALD 3D batch system |
|
| Plasma: | inductive coupled ECR plasma |
| Plasma power: | 600W |
| Substrate temperature: | ambient / plasma regulated |
| Precursor lines: | 2 (ambient to 200°C) |
| Gas lines: | 2 |
| Plasma chamber: | 180 mm x 180 mm x 210 mm (W x H x D) |
| Unit dimensions: | 650 mm x 750 mm x 800 mm (W x H x D) |
| Unit weight: | approx. 160 kg (without pump) |
| Control system: | PLC control with PC user interface |
| Power connection: | 400V / 16A |
| Options: | additional gas and precursor lines |
PLASMA ELECTRONIC GmbH · Otto-Lilienthal-Str. 2 · 79395 Neuenburg · Germany
phone: +49 7631 7017 -0 · fax: +49 7631 7017 -20 · info
myplas.de
phone: +49 7631 7017 -0 · fax: +49 7631 7017 -20 · info
myplas.de
myplas
PECVD system
PECVD system
myplas
ALD / PEALD system
ALD / PEALD system
O2 Plasma
in PEALD mode
in PEALD mode
myplas
PEALD 3D system
PEALD 3D system
Impressum:
PLASMA ELECTRONIC GmbH
Otto-Lilienthal-Str. 2
D - 79395 Neuenburg
GERMANY
Phone: +49 7631 7017 - 0
Fax: +49 7631 7017 - 20
E-Mail: infomyplas.de
Internet: www.myplas.de
Sitz: D 79395 NEUENBURG, HRB 300596
USt-IdNr.: DE 811 672 076
Geschäftsführer: Dr. Armin Mohr
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Design & Umsetzung: floss design